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発表年月
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タイトル／共同研究者
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掲載誌
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巻・号・頁
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学術機関等
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| 2025/01 |
DEVELOPMENT OF PMUT LINEAR ARRAY INCLUDED WITH FRESNEL ZONE PLATE FOCUSING FUNCTION
Tatsuya Shimoyama, Akihiko Teshigahara, Shinya Yoshida
|
The proceedings of IEEE MEMS 2025 |
103から
106ページまで
|
|
| 2024/08 |
Reduction mechanism of loss tangent of scandium-doped aluminum nitride thin film by post-deposition annealing
Akihiko Teshigahara, Tetsuya Enomoto, Hideo Yamada, Shinya Yoshida
|
Japanese Journal of Applied Physics |
63巻
9号
95501から
|
IOP Publishing |
| 2024/07 |
Fabrication and characterization of monocrystalline-based composite Pb(Zr, Ti)O<sub>3</sub> thin film patterned with a polycrystalline
crack stopper structure
Shinya Yoshida, Yu Katsumata, Shuji Tanaka
|
Japanese Journal of Applied Physics |
63巻
7号
75501から
75501ページまで
|
IOP Publishing |
| 2024/05 |
Influence of underlayer roughness on the properties of Sc<sub>0.4</sub>Al<sub>0.6</sub>N thin films prepared via sputter deposition
Akihiko Teshigahara, Tetsuya Enomoto, Hideo Yamada, Shinya Yoshida
|
Japanese Journal of Applied Physics |
63巻
5号
55501から
55501ページまで
|
IOP Publishing |
| 2024/02 |
Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film
stacking
Xuanmeng Qi, Shinya Yoshida, Sarah Risquez, Anirban Ghosh, Mohssen Moridi, Shuji Tanaka
|
Journal of Micromechanics and Microengineering |
34巻
3号
35005から
35005ページまで
|
IOP Publishing |
| 2024/01 |
EPITAXIAL SM-DOPED PMN-PT FILM WITH HIGH PIEZOELECTRIC CONSTANT FOR MEMS APPLICATION
Kai Fukushi, Shinya Yoshida, Xuanmeng Qi, Shuji Tanaka
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Proc. IEEE MEMS2024 |
23巻
January号
765から
768ページまで
|
|
| 2023/06 |
DEVELOPMENT OF PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER WITH DUAL HETEROGENEOUS PIEZOELECTRIC THIN FILM STACKING
X. Qi, S. Yoshida, M. Moridi, S. Risquez, A. Ghosh, S. Tanaka
|
The proceedings of Transducers 2023 |
857から
860ページまで
|
|
| 2023/01 |
Epitaxial P<sub>b</sub>(Z<sub>r</sub>,T<sub>i</sub>)O<sub>3</sub>-Based Piezoelectric Micromachined Ultrasonic Transducer
Fabricated on Silicon-On-Nothing (SON) Structure
Takuma Sekiguchi, Shinya Yoshida, Yoshiaki Kanamori, Shuji Tanaka
|
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS) |
139から
142ページまで
|
IEEE |
| 2022/08 |
Fabrication and characterization of row-column addressed pMUT array with monocrystalline PZT thin film toward creating ultrasonic
imager
Ziyi Liu, Shinya Yoshida, David A. Horsley, Shuji Tanaka
|
Sensors and Actuators A: Physical |
342巻
113666から
113666ページまで
|
Elsevier BV |
| 2022/05 |
Sputter Deposition and Characterization of Sm-Doped Pb(Mg<sub>1/3</sub>, Nb<sub>2/3</sub>)O？？PbTiO？ Epitaxial Thin Film on
Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application
Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
|
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
69巻
5号
1821から
1828ページまで
|
Institute of Electrical and Electronics Engineers (IEEE) |
| 2022/01 |
Fabrication of Monocrystalline-Based Composite PZT Thin Film with Polycrystalline Crack Stopper Structure
Yu Katsumata, Shinya Yoshida, Shuji Tanaka
|
The proceedings of 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) |
|
IEEE |
| 2021/11 |
Fabrication and characterization of annular-shaped piezoelectric micromachined ultrasonic transducer mounted with Pb(Zr,Ti)O<sub>3</sub>-based
monocrystalline thin film
Ziyi Liu, Shinya Yoshida, Shuji Tanaka
|
Journal of Micromechanics and Microengineering |
31巻
12号
125014から
125014ページまで
|
IOP Publishing |
| 2021/10 |
Sputter deposition and characterization of “epi-poly” Pb(Zr, Ti)O3 thin film on (100) Si substrate for MEMS applications
Yu Katsumata, Shinya Yoshida, Shuji Tanaka
|
Japanese Journal of Applied Physics |
60巻
10号
101005から
101005ページまで
|
IOP Publishing |
| 2021/01 |
SM-DOPED PB(MG 1/3, NB 2/3 )O3？PBTIO 3 SPUTTER-EPITAXY ON SI TOWARDS GIANT-PIEZOELECTRIC THIN FILM FOR MEMS
Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
|
The proceedings of IEEE MEMS2021 |
654から
657ページまで
|
|
| 2021/01 |
Development of Ingestible Thermometer With Built-in Coil Antenna Charged by Gastric Acid Battery and Demonstration of Long-Time
in Vivo Telemetry
Shinya Yoshida, Hiroshi Miyaguchi, Tsutomu Nakamura
|
IEEE Access |
9巻
102368から
102377ページまで
|
Institute of Electrical and Electronics Engineers (IEEE) |
| 2020/12 |
Development of Sputter Epitaxy Technique of Pure-Perovskite (001)/(100)-Oriented Sm-Doped Pb(Mg1/3, Nb2/3)O3？PbTiO3 on Si
Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka
|
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
67巻
12号
2738から
2744ページまで
|
Institute of Electrical and Electronics Engineers (IEEE) |
| 2020/10 |
Development of Mechanically-Robust pMUT Based on Island-Shaped Monocrystalline PZT Thin Film Partially Covered with Polyimide
Pham Ngoc Thao, Shinya Yoshida, Shuji Tanaka
|
Journal of Micromechanics and Microengineering |
|
IOP Publishing |
| 2020/10 |
Commercial Production of Low-k PZT film using Sputtering Method
Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki
|
Proceedings of IEEE Sensors |
2020-巻
|
Institute of Electrical and Electronics Engineers Inc. |
| 2020/09 |
Low-k PZT film for commercial use
Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki
|
The proceedings of 2020 IEEE International Ultrasonics Symposium |
1146から
1146ページまで
|
|
| 2020/07 |
Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications
Ryoma Miyake, Mario Kiuchi, Shinya Yoshida, Shuji Tanaka, Glen R. Fox
|
The proceedings of IEEE IFCS-ISAF 2020 |
|
|
| 2020/06 |
Feasibility Study of Ultrasonic Biometrics Based on Finger Vessel Imaging by Epitaxial-PZT/Si Piezoelectric Micromachined
Ultrasonic Transducer
Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryoichi Takayama, Shuji Tanaka
|
Sensors & Actuators: A. Physical |
312巻
112145から
112145ページまで
|
|
| 2020/06 |
Fabrication of <i>c</i>-Axis-Oriented PZT-Based Monocrystalline Thin Film with High Insulation Property on Si Substrate
Ryo Ebihara, Shinya Yoshida, Shuji Tanaka
|
IEEJ Transactions on Sensors and Micromachines |
140巻
6号
137から
143ページまで
|
Institute of Electrical Engineers of Japan (IEE Japan) |
| 2019/07 |
Prototyping of an All-pMOS-Based Cross-Coupled Voltage Multiplier in Single-Well CMOS Technology for Energy Harvesting Utilizing
a Gastric Acid Battery
Shinya Yoshida, Hiroshi Miyaguchi, Tsutomu Nakamura
|
Electronics |
8巻
7号
804から
804ページまで
|
MDPI AG |
| 2019/06 |
DEVELOPMENT OF MECHANICALLY-ROBUST PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) WITH ISLAND-SHAPED PZT MONOCRYSTALLINE
THIN FILM
Pham N. Thao, Shinya Yoshida, Shuji Tanaka
|
The proceedings of Transducers 2019 |
833から
836ページまで
|
|
| 2019/06 |
CHARACTERIZATION OF EPITAXIAL-PZT/SI PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) AND ITS PHASED ARRAY SYSTEM
Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryouichi Takayama, Shuji Tanaka
|
The proceedings of Transducers 2019 |
246から
249ページまで
|
|
| 2018/09 |
Fabrication and characterization of PZT fibered-epitaxial thin film on Si for piezoelectric micromachined ultrasound transducer
Pham Ngoc Thao, Shinya Yoshida, Shuji Tanaka
|
Micromachines |
9巻
455から
|
|
| 2018/09 |
“Investigation of Piezoelectricity and Curie Temperature of Pb(Mg1/3,Nb2/3)O3-PbTiO3 Epitaxial Thin Film on Si Prepared by
Sputter Deposition with Fast Cooling”
Shinya Yoshida, Takumi Morimura, Kiyotaka Wasa, Shuji Tanaka
|
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
65巻
1695から
1702ページまで
|
|
| 2018/01 |
Concept proof of low-energy consumption and compact ingestible thermometer based on gastric acid power generation
Shinya Yoshida, Hiroshi Miyaguchi, Tsutomu Nakamura
|
IEEJ Transactions on Sensors and Micromachines |
138巻
4号
164から
169ページまで
|
Institute of Electrical Engineers of Japan |
| 2018/01 |
Development of Tablet-Shaped Ingestible Core-Body Thermometer Powered by Gastric Acid Battery
Shinya Yoshida, Hiroshi Miyaguchi, Tsutomu Nakamura
|
IEEE Sensors Journal |
18巻
9755から
|
|
| 2017/12 |
Development of basic system of ingestible core body thermometer with small size and low energy consumption powered by gastric
acid battery
Shinya Yoshida, Hiroshi Miyaguchi, Tsutomu Nakamura
|
Proceedings of IEEE Sensors |
2017-巻
1から
3ページまで
|
Institute of Electrical and Electronics Engineers Inc. |
| 2017/11 |
Epitaxial growth of metallic buffer layer structure and<i>c</i>-axis oriented Pb(Mn<sub>1/3</sub>,Nb<sub>2/3</sub>)O<sub>3</sub>？Pb(Zr,Ti)O<sub>3</sub>thin
film on Si for high performance piezoelectric micromachined ultrasonic transducer
Pham Ngoc Thao, Shinya Yoshida, Shuji Tanaka
|
Japanese Journal of Applied Physics |
56巻
12号
127201から
127201ページまで
|
IOP Publishing |
| 2017/10 |
Epitaxial PMnN-PZT/Si MEMS ultrasonic rangefinder with 2 m range at 1 V drive
Zhen Zhou, Shinya Yoshida, Shuji Tanaka
|
Sensors and Actuators A: Physical |
266巻
352から
360ページまで
|
Elsevier BV |
| 2017/06 |
Development of buffer layer structure for epitaxial growth of (100)/(001)Pb(Zr,Ti)O<sub>3</sub>-based thin film on (111)Si
wafer
Takeshi Hayasaka, Shinya Yoshida, Shuji Tanaka
|
Japanese Journal of Applied Physics |
56巻
7号
71501から
71501ページまで
|
IOP Publishing |
| 2017/06 |
Monocrystalline PMNN-PZT thin film ultrasonic rangefinder with 2 meter range at 1 volt drive
Zhen Zhou, Shinya Yoshida, Shuji Tanaka
|
The proceedings of 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) |
|
IEEE |
| 2016/11 |
Enhanced curie temperature and high heat resistivity of PMnN-PZT monocrystalline thin film on Si
Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Shuji Tanaka
|
SENSORS AND ACTUATORS A-PHYSICAL |
251巻
100から
107ページまで
|
ELSEVIER SCIENCE SA |
| 2016/10 |
Structure and Ferroelectric Properties of High T-c BiScO3-PbTiO3 Epitaxial Thin Films
Kiyotaka Wasa, Shinya Yoshida, Hiroaki Hanzawa, Hideaki Adachi, Toshiyuki Matsunaga, Shuji Tanaka
|
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL |
63巻
10号
1636から
1641ページまで
|
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| 2016/08 |
Feasibility study of ingestible sensor platform powered by gastric acid battery for daily health care
S. Yoshida, H. Miyaguchi, T. Nakamura
|
The proceedings of 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) |
|
IEEE |
| 2016/05 |
Fabrication of Pierce-Type Nanocrystalline Si Electron-Emitter Array for Massively Parallel Electron Beam Lithography
Hitoshi Nishino, Shinya Yoshida, Akira Kojima, Nokatsu Ikegami, Shuji Tanaka, Nobuyoshi Koshida, Masayoshi Esashi
|
ELECTRONICS AND COMMUNICATIONS IN JAPAN |
99巻
5号
11から
19ページまで
|
WILEY-BLACKWELL |
| 2016/04 |
Investigation of Curie Temperature of Pb(Mg1/3Nb2/3)O3-PbTiO3 epitaxial thin film on Si Fabricated by Sputter Deposotion with
Fast Cooling Process
Yukihiro Hasegawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka
|
The proceedings of The 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS
2016)
|
|
|
| 2016/04 |
Fabrication of through silicon via with highly phosphorus-doped polycrystalline Si plugs for driving an active-matrix nanocrystalline
Si electron emitter array
Naokatsu Ikegami, Takashi Yoshida, Akira Kojima, Hiroshi Miyaguchi, Masanori Muroyama, Shinya Yoshida, Kentaro Totsu, Nobuyoshi
Koshida, Masayoshi Esashi
|
The proceedings of 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) |
|
IEEE |
| 2016/03 |
Fabrication and characterization of large figure-of-merit epitaxial PMnN-PZT/Si transducer for piezoelectric MEMS sensors
Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Shuji Tanaka
|
SENSORS AND ACTUATORS A-PHYSICAL |
239巻
201から
208ページまで
|
ELSEVIER SCIENCE SA |
| 2016/01 |
PZT系単結晶薄膜を用いた圧電MEMSのためのYSZエピタキシャルバッファ層のウエハレベルスパッタ成膜
Shinsuke Nishizawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka
|
IEEJ Transactions on Sensors and Micromachines |
136巻
10号
437から
442ページまで
|
Institute of Electrical Engineers of Japan |
| 2016/01 |
Development of a 17×17 Parallel Electron Beam Lithography System
Hiroshi Miyaguchi, Masanori Muroyama, Shinya Yoshida, Naokatsu Ikegami, Akira Kojima, Shuji Tanaka, Masayoshi Esashi
|
IEEJ Transactions on Sensors and Micromachines |
136巻
9号
413から
419ページまで
|
Institute of Electrical Engineers of Japan |
| 2015/08 |
Integration of Boron-Doped Diamond Microelectrode on CMOS-Based Amperometric Sensor Array by Film Transfer Technology
Takeshi Hayasaka, Shinya Yoshida, Kumi Y. Inoue, Masanori Nakano, Tomokazu Matsue, Masayoshi Esashi, Shuji Tanaka
|
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS |
24巻
4号
958から
967ページまで
|
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| 2015/07 |
Development of ballistic hot electron emitter and its applications to parallel processing: active-matrix massive direct-write
lithography in vacuum and thin-film deposition in solutions
Nobuyoshi Koshida, Akira Kojima, Naokatsu Ikegami, Ryutaro Suda, Mamiko Yagi, Junichi Shirakashi, Hiroshi Miyaguchi, Masanori
Muroyama, Shinya Yoshida, Kentaro Totsu, Masayoshi Esashi
|
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS |
14巻
3号
|
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS |
| 2015/01 |
An LSI for Massive Parallel Electron Beam Lithography: Its Design and Evaluation
Hiroshi Miyaguchi, Masanori Muroyama, Shinya Yoshida, Naokatsu Ikegami, Akira Kojima, Ryosuke Kaneko, Kentaro Totsu, Shuji
Tanaka, Nobuyoshi Koshida, Masayoshi Esashi
|
電気学会論文誌Ｅ |
135巻
10号
374から
381ページまで
|
|
| 2015/01 |
LARGE FIGURE-OF-MERIT EPITAXIAL PB(MN,NB)O-3-PB(ZR,TI)O-3/SI TRANSDUCER FOR PIEZOELECTRIC MEMS SENSORS
Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka
|
The proceedings of 2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS
(TRANSDUCERS)
|
1338から
1341ページまで
|
IEEE |
| 2015/01 |
Development of Ballistic Hot Electron Emitter and its Applications to Parallel Processing: Active-Matrix Massive Direct-Write
Lithography in Vacuum and Thin Films Deposition in Solutions
N. Koshida, A. Kojima, N. Ikegami, R. Suda, M. Yagi, J. Shirakashi, T. Yoshida, H. Miyaguchi, M. Muroyama, H. Nishino, S.
Yoshida, M. Sugata, K. Totsu, M. Esashi
|
ALTERNATIVE LITHOGRAPHIC TECHNOLOGIES VII |
9423巻
|
SPIE-INT SOC OPTICAL ENGINEERING |
| 2015/01 |
Advanced LSI-based amperometric sensor array with light-shielding structure for effective removal of photocurrent and mode
selectable function for individual operation of 400 electrodes
Kumi Y. Inoue, Masahki Matsudaira, Masanori Nakano, Kosuke Ino, Chika Sakamoto, Yusuke Kanno, Reyushi Kubo, Ryota Kunikata,
Atsushi Kira, Atsushi Suda, Ryota Tsurumi, Toshihito Shioya, Shinya Yoshida, Masanori Muroyama, Tomohiro Ishikawa, Hitoshi
Shiku, Shiro Satoh, Masayoshi Esashi, Tomokazu Matsue
|
LAB ON A CHIP |
15巻
3号
848から
856ページまで
|
ROYAL SOC CHEMISTRY |
| 2014/10 |
An investigation of the mechanical strengthening effect of hydrogen anneal for silicon torsion bar
Ryo Hajika, Shinya Yoshida, Yoshiaki Kanamori, Masayoshi Esashi, Shuji Tanaka
|
JOURNAL OF MICROMECHANICS AND MICROENGINEERING |
24巻
10号
105014から
105014ページまで
|
IOP PUBLISHING LTD |
| 2014/09 |
Highly c-Axis-Oriented Monocrystalline Pb( Zr, Ti)O-3 Thin Films on Si Wafer Prepared by Fast Cooling Immediately After Sputter
Deposition
Shinya Yoshida, Hiroaki Hanzawa, Kiyotaka Wasa, Masayoshi Esashi, Shuji Tanaka
|
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL |
61巻
9号
1552から
1558ページまで
|
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| 2014/03 |
Densified electrochemical sensors based on local redox cycling using vertically separated electrodes for substrate generation/chip
collection and extended feedback modes.
Kosuke Ino, Yusuke Kanno, Taku Nishijo, Hirokazu Komaki, Yuta Yamada, Shinya Yoshida, Yasufumi Takahashi, Hitoshi Shiku, Tomokazu
Matsue
|
Analytical Chemistry |
86巻
4016から
4023ページまで
|
|
| 2014/03 |
Development of UV-assisted ozone steam etching and investigation of its usability for SU-8 removal
Shinya Yoshida, Masayoshi Esashi, Shuji Tanaka
|
JOURNAL OF MICROMECHANICS AND MICROENGINEERING |
24巻
3号
35007から
35007ページまで
|
IOP PUBLISHING LTD |
| 2014/01 |
Fabrication of pierce-type nanocrystalline si electron-emitter array for massively parallel electron beam lithography
Hitoshi Nishino, Shinya Yoshida, Akira Kojima, Nokatsu Ikegami, Shuji Tanaka, Nobuyoshi Koshida, Masayoshi Esashi
|
IEEJ Transactions on Sensors and Micromachines |
134巻
6号
146から
153ページまで
|
Institute of Electrical Engineers of Japan |
| 2014/01 |
DEVELOPMENT OF MEMS PIERCE-TYPE NANOCRYSTALLINE SI ELECTRON-EMITTER ARRAY FOR MASSIVELY PARALLEL ELECTRON BEAM DIRECT WRITING
Hitoshi Nishino, Shinya Yoshida, Akira Kojima, Naokatsu Ikegami, Nobuyoshi Koshida, Shuji Tanaka, Masayoshi Esashi
|
The proceedings of 2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) |
27巻
467から
470ページまで
|
IEEE |
| 2014/01 |
Highly c-Axis Oriented Monocrystalline Pb(Zr, Ti)O-3 based Thin Film on Si Wafer by Sputter Deposition with Fast Cooling Process
Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka
|
The proceedings of 2014 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) |
907から
910ページまで
|
IEEE |
| 2014/01 |
INTEGRATION OF DIAMOND MICROELECTRODES ON CMOS-BASED AMPEROMETRIC BIOSENSOR ARRAY BY FILM TRANSFER TECHNOLOGY
Takeshi Hayasaka, Shinya Yoshida, Kumi Y. Inoue, Masanori Nakano, Tomohiro Ishikawa, Tomokazu Matsue, Masayoshi Esashi, Shuji
Tanaka
|
2014 IEEE 27TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) |
27巻
322から
325ページまで
|
IEEE |
| 2013/12 |
Annealing Transformation of Diamond-Like Carbon Using Ni Catalyst
Junji Sone, Naoto Shigeta, Katsumi Yamada, Takayuki Uchida, Shinya Yoshida, Takeshi Hayasaka, Shuji Tanaka
|
JAPANESE JOURNAL OF APPLIED PHYSICS |
52巻
12号
128005から
128005ページまで
|
IOP PUBLISHING LTD |
| 2013/06 |
Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol？gel-based high-aspect-ratio
PZT structure
Shinya Yoshida, Nan Wang, Masafumi Kumano, Yusuke Kawai, Shuji Tanaka, Masayoshi Esashi
|
Journal of Micromechanics and Microengineering |
23巻
6号
65014から
65014ページまで
|
IOP PUBLISHING LTD |
| 2013/04 |
Investigation of mechanical and tribological properties of polyaniline brush by atomic force microscopy for scanning probe-based
data storage
Shinya Yoshida, So Fujinami, Masayoshi Esashi
|
e-Journal of Surface Science and Nanotechnology |
11巻
53から
59ページまで
|
|
| 2013/02 |
Simple Removal Technology of Chemically Stable Polymer in MEMS Using Ozone Solution
Shinya Yoshida, Hideaki Yanagida, Masayoshi Esashi, Shuji Tanaka
|
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS |
22巻
1号
87から
93ページまで
|
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC |
| 2013/01 |
Measurement of muonium emission from silica aerogel
P. Bakule, G. A. Beer, D. Contreras, M. Esashi, Y. Fujiwara, Y. Fukao, S. Hirota, H. Iinuma, K. Ishida, M. Iwasaki, T. Kakurai,
S. Kanda, H. Kawai, N. Kawamura, G. M. Marshall, H. Masuda, Y. Matsuda, T. Mibe, Y. Miyake, S. Okada, K. Olchanski, A. Olin,
H. Onishi, N. Saito, K. Shimomura, P. Strasser, M. Tabata, D. Tomono, K. Ueno, K. Yokoyama, S. Yoshida
|
Progress of Theoretical and Experimental Physics |
2013巻
10号
|
|
| 2013/01 |
UV-assisted intermittently-spinning ozone steam etching of SU-8 for micromolding process
Shinya Yoshida, Kei Suzuki, Masayoshi Esashi, Shuji Tanaka
|
The proceedings of 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators
and Microsystems, TRANSDUCERS and EUROSENSORS 2013
|
17巻
1621から
1624ページまで
|
|
| 2013/01 |
Development of maskless electron-beam lithography using nc-Si electron-emitter array
A. Kojima, N. Ikegami, T. Yoshida, H. Miyaguchi, M. Muroyama, H. Nishino, S. Yoshida, M. Sugata, S. Cakir, H. Ohyi, N. Koshida,
M. Esashi
|
Proceedings of SPIE - The International Society for Optical Engineering |
8680巻
|
|
| 2013/01 |
Mechanical strengthening of silicon torsion bar of MEMS scanning mirror by hydrogen anneal
R. Hajika, S. Yoshida, W. Makishi, Y. Kanamori, S. Tanaka, M. Esashi
|
The proceedings of 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) |
|
IEEE |
| 2013/01 |
LATERALLY-DRIVEN PIEZOELECTRIC BIMORPH MEMS ACTUATOR WITH SOL-GEL-BASED HIGH-ASPECT-RATIO PZT STURUCTURE
N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka, M. Esashi
|
The proceedings of 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013) |
26巻
197から
200ページまで
|
IEEE |
| 2012/12 |
HYDROGEN ANNEALING PROCESS TO IMPROVE FRACTURE TOUGHNESS OF SILICON COIL SPRING FOR MECHANICAL ENERGY STORAGE APPLICATION
T. Suzuki, T. Hayashi, N. Kogushi, Y. Saitoh, R. Hajika, S. Yoshida, M. Moriyama, K. Totsu, Y. Kanamori, S. Tanaka
|
The proceedings of the 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion
Applications (Power MEMS2012)
|
12巻
279から
282ページまで
|
|
| 2012/04 |
Conformal coating of poly-glycidyl methacrylate as lithographic polymer via initiated chemical vapor deposition
Shinya Yoshida, Tatsuya Kobayashi, Masafumi Kumano, Masayoshi Esashi
|
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS |
11巻
2号
|
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS |
| 2012/01 |
Fabrication of high-aspect-ratio PZT structure by nanocomposite sol-gel method for laterally-driven piezoelectric MEMS switch
Nan Wang, Shinya Yoshida, Masafumi Kumano, Yusuke Kawai, Masayoshi Esashi
|
The proceedings of 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
7巻
247から
252ページまで
|
|
| 2012/01 |
LSI-based amperometric sensor for bio-imaging and multi-point biosensing
Kumi Y. Inoue, Masahki Matsudaira, Reyushi Kubo, Masanori Nakano, Shinya Yoshida, Sakae Matsuzaki, Atsushi Suda, Ryota Kunikata,
Tatsuo Kimura, Ryota Tsurumi, Toshihito Shioya, Kosuke Ino, Hitoshi Shiku, Shiro Satoh, Masayoshi Esashi, Tomokazu Matsue
|
LAB ON A CHIP |
12巻
18号
3481から
3490ページまで
|
ROYAL SOC CHEMISTRY |
| 2011/12 |
Redox active polymers with phenothiazine moieties for nanoscale patterning via conductive scanning force microscopy
Ali A. Golriz, Tassilo Kaule, Jeannine Heller, Maria B. Untch, Philipp Schattling, Patrick Theato, Masaya Toda, Shinya Yoshida,
Takahito Ono, Hans Jurgen Butt, Jochen Stefan Gutmann, Rudiger Berger
|
Nanoscale |
3巻
12号
5049から
5058ページまで
|
|
| 2011/08 |
Local electrical modification of a conductivity-switching polyimide film formed by molecular layer deposition
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
|
Nanotechnology |
22巻
33号
335302から
|
|
| 2011/01 |
Etching technology using ozone for chemically stable polymer in MEMS
Hideaki Yanagida, Shinya Yoshida, Masayoshi Esashi, Shuji Tanaka
|
IEEJ Transactions on Sensors and Micromachines |
131巻
3号
4から
127ページまで
|
|
| 2011/01 |
Simple removal technology using ozone solution for chemically-stable polymer used for MEMS
H. Yanagida, S. Yoshida, M. Esashi, S. Tanaka
|
The proceedings of 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems |
|
IEEE |
| 2010/10 |
Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning
probe microscope
S. Yoshida, T. Ono, M. Esashi
|
Micro and Nano Letters |
5巻
5号
321から
323ページまで
|
|
| 2008/11 |
Conductive polymer patterned media fabricated by diblock copolymer lithography for scanning multiprobe data storage
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
|
Nanotechnology |
19巻
47号
475302から
475400ページまで
|
|
| 2008/09 |
Formation of a flat conductive polymer film using Template-Stripped Gold (TSG) surface and surface-graft polymerization for
scanning multiprobe data storage
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
|
e-Journal of Surface Science and Nanotechnology |
6巻
202から
208ページまで
|
|
| 2007/12 |
Conductive polymer patterned media for scanning multiprobe data storage
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
|
Nanotechnology |
18巻
50号
505302から
505306ページまで
|
|
| 2007/01 |
Optical amplification of the resonance of a bimetal silicon cantilever
Takahito Ono, Shinya Yoshida, Yusuke Kawai, Masayoshi Esashi
|
Applied Physics Letters |
90巻
24号
243112から
243114ページまで
|
|
| 2007/01 |
Photothermal transducer based on ultrathin bimetal Si resonator
Takahito Ono, Shinya Yoshida, Yusuke Kawai, Masayoshi Esashi
|
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
639から
642ページまで
|
|
| 2007/01 |
Conductive Polymer Patternd Media for Scanning Multiprobe Data Storage
Shinya Yoshida, Takahito Ono, Masayoshi Esashi
|
The proceedings of TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference |
|
IEEE |
| 2005/11 |
Reversible electrical modification on conductive polymer for proximity probe data storage
Shinya Yoshida, Takahito Ono, Shuichi Oi, Masayoshi Esashi
|
Nanotechnology |
16巻
11号
2516から
2520ページまで
|
|
| 2005/09 |
Reversible electrical modification on conductive polymer for proximity probe data storage
Shinya Yoshida, Takahito Ono, Shuichi Oi, Masayoshi Esashi
|
Journal of Micromechanics and Microengineering |
15巻
2282から
2288ページまで
|
|
| 2005/01 |
Reversible electrical modification on conductive polymer for scanning multiprobe data storage
Shinya Yoshida, Takahito Ono, Shuichi Oi, Masayoshi Esashi
|
Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05 |
2巻
1300から
1303ページまで
|
|
| 2003/09 |
Electrical modification of a conductive polymer using a scanning probe microscope
Takahito Ono, Shinya Yoshida, Masayoshi Esashi
|
Nanotechnology |
14巻
9号
1051から
1054ページまで
|
|